Optimization of SrTiO3 precursor films on MgO substrates prepared by the metal-organic decomposition method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 12, 2007, Pages 7849-7851

  Uchiyama, Tetsuji ^a   Watanabe, Shoji ^b   Tachiki, Takashi ^b   Uchida, Takashi ^b  

^a MIYAGI UNIVERSITY OF EDUCATION   (Japan)

^b NATIONAL DEFENSE ACADEMY   (Japan)

Author keywords

Buffer layer; FWHM; MgO substrate; MOD; Precursor film; SrTiO3 thin film; X ray diffraction; X ray photoelectron spectroscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; BUFFER LAYERS; DEPOSITION; MAGNESIA; STRONTIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

MGO SUBSTRATES; PRECURSOR FILMS; PRECURSOR TEMPERATURE;

THIN FILMS;

EID: 37549030488     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.7849     Document Type: Article

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