Liquid crystal alignment effects on SiNx thin film layers treated by ion-beam irradiation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 12, 2007, Pages 7711-7713

  Lee, Sang Keuk ^a   Kim, Jong Hwan ^a   Oh, Byeong Yun ^a   Kang, Dong Hun ^a   Kim, Byoung Yong ^a   Han, Jin Woo ^a   Kim, Young Hwan ^a   Han, Jeong Min ^a   Hwang, Jeoung Yeon ^a   Ok, Chul Ho ^a   Seo, Dae Shik ^a  

^a Yonsei University   (South Korea)

Author keywords

Incidence angle; Ion beam; LC alignment; Pretilt angle; SiNx

Indexed keywords

ION BEAMS; IRRADIATION; NEMATIC LIQUID CRYSTALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; SWITCHING;

INCIDENCE ANGLE; ION-BEAM IRRADIATION; LC ALIGNMENT; PRETILT ANGLE;

THIN FILMS;

EID: 37549022641     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.7711     Document Type: Article

References (12)

1. J. M. Geary, J. W. Goodby, A. R. Kmetz, and J. S. Patel: J. Appl. Phys. 62 (1987) 4100.
2. D.-S. Seo, S. Kobayashi, and M. Nishikawa: Appl. Phys. Lett. 61 (1992) 2392.
3. D.-S. Seo, K. Araya, N. Yoshida, M. Nishikawa, Y. Yabe, and S. Kobayashi: Jpn. J. Appl. Phys. 34 (1995) L503.
4. H.-K. Kang, J.-Y. Hwang, C.-J. Park, D.-S. Seo, K.-C. Kim, H.-J. Ahn, J.-B. Kim, and H.-K. Baik: Mol. Cryst. Liq. Cryst. 434 (2005) 135.
5. H. Yokoyama: Mol. Cryst. Liq. Cryst. 165 (1988) 269.
6. H. Yokoyama, S. Kobayashi, and H. Kamei: J. Appl. Phys. 61 (1987) 4501.
7. D.-S. Seo, S. Kobayashi., D.-Y. Kang, and H. Yokoyama: Jpn. J. Appl. Phys. 34 (1995) 3607.
8. D.-S. Seo and J.-Y. Hwang: Jpn. J. Appl. Phys. 39 (2000) 816.
9. J.-Y. Hwang, Y.-M. Jo, J. Jang, and D.-S. Seo: Jpn. J. Appl. Phys. 42 (2003) L114.
10. J.-Y. Hwang, Y.-M. Jo, D.-S. Seo, S.-J. Rho, D.-K. Lee, and H.-K. Baik: Jpn. J. Appl. Phys. 41 (2002) L654.
11. J.-Y. Hwang, Y.-M. Jo, S.-J. Rho, H.-K. Baik, and D.-S. Seo: Jpn. J. Appl. Phys. 41 (2002) L992.
12. C.-J. Park, J.-Y. Hwang, H.-K. Kang, H.-J. Ahn, J.-B. Kim, K.-C. Kim, H.-K. Baik, and D.-S. Seo: Jpn. J. Appl. Phys. 44 (2005) 1352.