Synthesis and optical properties of EB induced refractive index lithography materials based on aliphatic polyimides

Journal of Photopolymer Science and Technology

Volumn 20, Issue 5, 2007, Pages 739-742

  Yamashita, Takashi ^a   Ogawa, Mutsuki ^a   Koshikawa, Hiroshi ^b   Maekawa, Yasunari ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b Quantum Beam Science Directorate

Author keywords

Charge transfer; EB; Polyimide; Refractive index

Indexed keywords

EID: 37549002055     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.20.739     Document Type: Article

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