Integration of BST thin film for dram fabrication

Integrated Ferroelectrics

Volumn 11, Issue 1-4, 1995, Pages 101-109

  Itoh, Hiromi ^a   Kashihara, Kehchirou ^a   Okudaira, Tomonori ^a   Tsunemine, Yoshikazu ^a   Ohno, Yoshikazu ^a   Nishimura, Tadashi ^a   Horikawa, Tsuyoshi ^a   Shibano, Teruo ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3743127743     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584589508013582     Document Type: Article

References (2)

1. T. Eimori et al. Technical Digest of the IEDM93, 631 (1993)
2. Y. Ohno et al., Technical Digest of the 1994 Sym. on VLSI Tech., 149 (1993)