Ultrasonic time-frequency characterization of silicon wafers at elevated temperatures

American Society of Mechanical Engineers, Applied Mechanics Division, AMD

Volumn 226, Issue , 1997, Pages 37-43

  Suh, C Steve ^a   Rabroker, G Andrew ^a   Burger, Christian P ^a   Chona, Ravinder ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3743119620     PISSN: 01608835     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (13)

1. Burger, C.P., Schumacher, N.A., Duffer, C.E., and Knab, T.D. , 1993, " Fiber-Optic Techniques for Generating and Detecting Ultrasonic Waves for Quantitative NDE," Optics and Lasers in Engineering, Vol. 19, pp. 121-140.
2. Dudderar, T.D., Burger, C.P., and Gilbert, J.A., 1987, "Fiber Optic Sensing for Ultrasonic NDE," Journal of Nondestructive Evaluation, Vol. 6(3), pp. 135-146.
3. Goswarni, J.C., 1995," Applications of Semi-Orthogonal Spline Wavelets in Electromagnetics and Microwave Problems," Ph.D. Dissertation, Texas A&M University, College Station, Texas.
4. Inoue, H., Kishimoto, K., and Shibuya, T., 1996, "Experimental Wavelet Analysis of Flexural Waves in Beams," Experimental Mechanics, Vol. 36(3), pp. 212-217.
5. Kishimoto, K., Inoue, H., Hamada, M. and Shibuya, T., 1995, "Time-Frequency Analysis of Dispersive Waves by Means of Wavelet Transform," Journal of Applied Mechanics, Vol. 62(4), pp. 841-846.
6. Knab, T.D., 1994, "Improvements and Applications of Non-Contacting Interferometry," M.S. Thesis, Texas A&M University, College Station, Texas.
7. Lee, Y.J., Chou, C.H., Khuri-Yakub, B.T., and Saraswat, K.C., 1990, "Non-Invasive Process Temperature Monitoring Using Laser-Acoustic Techniques," Proceedings, 1990 Symposium on VLSI Technology, IEEE Electronic Devices Society, Honolulu, Hawaii, pp. 105-106.
8. Lu, Y., Moor, M.V., Queheillalt, D.T., and Wadley, H.N.G., 1994, "A Lamb Wave Temperature Sensor for Semiconductor Wafer Processing," Review of Progress in Quantitative Nondestructive Evaluation, D.O. Thompson and D.E. Chimenti, ed., Plenum Press, New York, Vol. 13a, pp. 509-516.
9. Rabroker, G.A., Suh, C.S., Burger, C.P., and Chona, R., 1997, "Analytical Feasibility of Laser Induced Stress Wave Thermometry Applied to Silicon Wafers," Proceedings, Symposium on Applications of Experimental Mechanics to Electronic Packaging, 1997 ASME International Mechanical Engineering Congress and Exhibition, Dallas, Texas.
10. Schumacher, N.A., 1990, "Fiber Tip Interferometer for Non-Contact Ultrasonic NDE," M.S. Thesis, Texas A&M University, College Station, Texas.
11. Schumacher, N.A., Burger, C.P., and Gien, P.H., 1993, "A Laser Based Investigation of Higher-Order Modes in Transient Lamb Waves," Journal of the Acoustical Society of America, Vol. 93(5), pp. 2981-2984.
12. Schumacher, N.A. and Burger, C.P., 1994, "Frequency Based Analysis Methods for Laser generated and Detected Transient Lamb Waves in Plates," Review of Progress in Quantitative Nondestructive Evaluation, D.O. Thompson and D.E. Chimenti, ed., Plenum Press, New York, Vol. 13a, pp. 157-164.
13. Suh, C.S., 1997, "Numerical Modeling of Laser Acoustic Waves Using Finite Element Method and Fast Integral Wavelet Transform," Ph.D. Dissertation, Texas A&M University, College Station, Texas.