Applications of the rapidly renewable lap

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3134, Issue , 1997, Pages 240-251

  Parks, Robert E ^a,b   Evans, Christopher J ^a   Roderick, David J ^a,c   Dagata, John A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Optical Perspectives Group LLC   (United States)

^c ROHM AND HAAS COMPANY   (United States)

Author keywords

Ceramics; Glasses; Lapping; Metals; Polishing

Indexed keywords

CERAMIC MATERIALS; GLASS; METALLIC COMPOUNDS; POLISHING;

CERAMICS; GLASSES; METALLIC SURFACES; METALS;

LAPPING;

EID: 3743101798     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.295130     Document Type: Conference Paper

References (10)

1. Evans C. J. and Parks R. E., "Rapidly Renewable Polishing Lap," Proc. SPIE. 2536, 248-55 (1995).
2. Evans C. J., Parks, R. E., Roderick D. J. and Evans B. A., "Experiences with the Rapidly Renewable Lap," Optical Fabrication and Testing Workshop, 1996 Technical Digest Series, Vol 7, pp 131-33
3. Leistner A., "Teflon Laps: Some New Developments and Results," Appl. Opts. 32, 3416 (1993).
4. Fiber Ceramics Inc, Cudahy, WI
5. HiTec Ceramics, Alfred, NY
6. Parks R. E., Evans C. J. and Asmail C., "Research Uses of Black Glass," Optical Fabrication and Testing Workshop, OSA 1994 Technical Digest Series, Vol 13, pp 98-101
7. "Standard Practices and Nomenclature for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces" ASTM F 154-88.
8. Schimmel D. G. and Elkind M. J., "An Examination of the Chemical Staining of Silicon," J. Electrochemical Soc; Solid State Science and Technology, Jan 1987, pp 152-5
9. Parks R. E. and Evans C. J., "Rapid Post-polishing of Diamond Turned Surfaces," Prec. Eng. 16, 223 (1994).
10. Cabot Semisperse FE10W/W-A355