Thick film SiC epitaxy for 'filling up' micropipes

Materials Science Forum

Volumn 264-268, Issue PART 1, 1998, Pages 167-170

  Khlebnikov, I ^a   Madangarli, V P ^a   Khan, M A ^a   Sudarshan, T S ^a  

^a The Department of Mechanical Engineering   (United States)

Author keywords

Micropipe Filling; Micropipes; Thick Film Epitaxy

Indexed keywords

CRYSTALLIZATION; EPITAXIAL GROWTH; FILM GROWTH; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SUBSTRATES; THICK FILM CIRCUITS;

MICROPIPE FILLING; PHYSICAL VAPOR TRANSPORT PROCESS;

SILICON CARBIDE;

EID: 3743074879     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.264-268.167     Document Type: Article

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