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Volumn , Issue , 2007, Pages 305-310
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Laser heating and thermally enhanced deformation of silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
FIBER COUPLED INFRARED (IR) LASER;
LASER WAVELENGTH;
THERMALLY ENHANCED DEFORMATION;
DEFORMATION;
DIAMOND CUTTING TOOLS;
FIBER LASERS;
LASER HEATING;
PRECISION ENGINEERING;
SEMICONDUCTOR LASERS;
WAVELENGTH;
SILICON;
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EID: 37349123208
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1115/MSEC2007-31014 Document Type: Conference Paper |
Times cited : (4)
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References (5)
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