Novel patterning of gold using spin-coatable gold electron-beam resist

ETRI Journal

Volumn 29, Issue 6, 2007, Pages 814-816

  Kim, Ki Chul ^a   Lee, Im Bok ^a   Kang, Dae Joon ^a   Maeng, Sunglyul ^b  

^a Sungkyunkwan University   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Functionalized gold nanocrystals; Gold electron beam resist; Patterning method

Indexed keywords

ELECTRODEPOSITION; ELECTRON BEAM LITHOGRAPHY; ETCHING; LIGANDS; SPIN COATING;

AMINE LIGANDS; FUNCTIONALIZED GOLD NANOCRYSTALS; GOLD ELECTRON-BEAM RESISTS; PATTERNING METHOD;

NANOCRYSTALS;

EID: 37249077938     PISSN: 12256463     EISSN: None     Source Type: Journal    
DOI: 10.4218/etrij.07.0207.0183     Document Type: Article

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