Post-CMOS electrode formation and isolation for on-chip temperature-controlled electrochemical sensors

Electronics Letters

Volumn 44, Issue 1, 2008, Pages 29-30

  Trombly, N ^a   Mason, A ^a  

^a Michigan State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMIMETICS; BIOSENSORS; ELECTROCHEMICAL ELECTRODES; MICROELECTRODES; TEMPERATURE CONTROL;

ELECTROCHEMICAL ARRAY SYSTEMS; MICROELECTRODE ARRAY;

CMOS INTEGRATED CIRCUITS;

EID: 37249003304     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20080912     Document Type: Article

References (5)

1. Worden, R.M., Hassler, B., Kim, P., Kohli, N., Mason, A., Zeikus, J.G., Laivenieks, M., and Ofoli, R.: ' Biomimetic interfaces for a multifunctional biosensor array microsystem ', IEEE Int. Conf. on Sensors, Vienna, Austria, October, 2004, p. 991-994
2. Kim, P., Kohli, N., Hassler, B., Dotson, N., Mason, A., Worden, R.M., and Ofoli, R.: ' An electrochemical interface for integrated biosensors ', IEEE Int. Conf. on Sensors, Toronto, Canada, October, 2003, p. 1036-1040
3. Zhu, X., and Ahn, C.H.: ' On-chip electrochemical analysis system using nanoelectrodes and bioelectronic CMOS chip ', IEEE Sens. J., 2006, 6, p. 1280-1286 10.1109/JSEN.2006.881351 1530-437X
4. Zhang, J., Huang, Y., Trombly, N., Yang, C., and Mason, A.: ' Electrochemical array microsystem with integrated potentiostat ', IEEE Int. Conf. on Sensors, Irvine, California, USA, October, 2005, p. 385-388
5. Deng, T., Tien, J., Xu, B., and Whitesides, G.M.: ' Using patterns in microfiche as photomasks in 10-um-scale microfabrication ', Langmuir, 1999, 15, p. 6575-6581 10.1021/la990372p 0743-7463