Subwavelength proximity nanolithography using a plasmonic lens

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2271-2276

  Seo, Sungkyu ^a   Kim, Hyun Chul ^a   Ko, Hyungduk ^a   Cheng, Mosong ^a  

^a Texas AandM University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CYLINDRICAL SURFACE PLASMON (SP); FOCAL LENGTH; NUMERICAL APERTURE;

ELECTRON BEAM LITHOGRAPHY; FULL WIDTH AT HALF MAXIMUM; FUSED SILICA; LENSES; MATHEMATICAL MODELS; SURFACE PLASMON RESONANCE; WAVELENGTH;

NANOLITHOGRAPHY;

LITHOGRAPHY;

EID: 37149053782     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2804517     Document Type: Article

References (24)

1. G. T. di Francia, Nuovo Cimento, Suppl. 9, 426 (1952).
2. B. J. Lin, Microelectron. Eng. 0167-9317 10.1016/0167-9317(87)90015-3 6, 31 (1987).
3. H. Bethe, Phys. Rev. 0031-899X 10.1103/PhysRev.66.163 66, 163 (1944).
4. J. B. Pendry, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.85.3966 85, 3966 (2000).
5. W. L. Barnes, A. Dereux, and T. W. Ebbesen, Nature (London) 0028-0836 10.1038/nature01937 424, 824 (2003).
6. H. F. Ghaemi, T. Thio, D. E. Grupp, T. W. Ebbesen, and H. J. Lezec, Phys. Rev. B 0163-1829 10.1103/PhysRevB.58.6779 58, 6779 (1998).
7. N. Fang, H. Lee, C. Sun, and X. Zhang, Science 0036-8075 10.1126/science.1108759 308, 534 (2005).
8. D. O. S. Melville and R. J. Blaikie, Opt. Express 1094-4087 10.1364/OPEX.13.002127 13, 2127 (2005).
9. W. Srituravanich, N. Fang, C. Sun, Q. Luo, and X. Zhang, Nano Lett. 1530-6984 10.1021/nl049573q 4, 1085 (2004).
10. D. B. Shao and S. C. Chen, Appl. Phys. Lett. 0003-6951 10.1063/1.1951052 86, 253107 (2005).
11. W. Srituravanich, S. Durant, H. Lee, C. Sun, and X. Zhang, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2091088 23, 2636 (2005).
12. D. O. S. Melville and R. J. Blaikie, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1813462 22, 3470 (2004).
13. N. Fang, H. Lee, C. Sun, and X. Zhang, Science 0036-8075 10.1126/science.1108759 308, 534 (2005).
14. X. Luo and T. Ishihara, Appl. Phys. Lett. 0003-6951 10.1063/1.1760221 84, 4780 (2004).
15. Z. Liu, Q. Wei, and X. Zhang, Nano Lett. 1530-6984 10.1021/nl0506094 5, 957 (2005).
16. T. W. Ebbesen, H. Lezec, H. Ghami, T. Thio, and P. Wolff, Nature (London) 0028-0836 10.1038/35570 391, 667 (1998).
17. D. E. Grupp, H. J. Lezec, T. Thio, and T. W. Ebbesen, Adv. Mater. 11, 860 (1999). 0935-9648
18. P. T. Worthinga and W. L. Barnes, Appl. Phys. Lett. 0003-6951 10.1063/1.1414294 79, 3035 (2001).
19. H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, and T. W. Ebbesen, Science 0036-8075 10.1126/science.1071895 297, 820 (2002).
20. C. Genet and T. W. Ebbesen, Nature (London) 0028-0836 10.1038/nature05350 445, 39 (2007).
21. E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, 1998).
22. M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University Press, Cambridge, 1999), pp. 335-336, 439-443.
23. S. Seo, H. Ko, H. C. Kim, and M. Cheng, Nano Lett. (submitted). 1530-6984
24. I. J. Djomehri, T. A. Savas, and H. Smith, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.590472 16, 3426 (1998).