Surface energy induced patterning of organic and inorganic materials on heterogeneous Si surfaces

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 1993-1997

  Tao, L ^a   Crouch, A ^a   Yoon, F ^a   Lee, B K ^a   Guthi, J S ^b   Kim, J ^a   Gao, J ^b   Hu, W ^a  

^a The University of Texas at Dallas   (United States)

^b UNIVERSITY OF TEXAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INORGANIC FILMS; INORGANIC MATERIALS; SURFACE ENERGY INDUCED PATTERNING (SEIP); THERMAL ANNEALING;

ANNEALING; INTERFACIAL ENERGY; LITHOGRAPHY; MICROFLUIDICS; SILANES; SILICON;

ORGANIC COMPOUNDS;

EID: 37149052475     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2804577     Document Type: Article

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