SCOPUS 정보 검색 플랫폼

Volumn 25, Issue 6, 2007, Pages 2123-2126

Bit-array patterns with density over 1 Tbit in.2 fabricated by extreme ultraviolet interference lithography

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE EQUIPMENT; DENSITY (SPECIFIC GRAVITY); DIFFRACTION GRATINGS; OPTICAL RESOLVING POWER; TWO DIMENSIONAL;

CALIXARENE; HYDROGEN SILSESQUIOXANE; TRANSMISSION DIFFRACTION GRATINGS;

EXTREME ULTRAVIOLET LITHOGRAPHY;

EID: 37149011432 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2799974 Document Type: Article

Times cited : (15)

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