Thin film resonators for TNT vapor detection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3392, Issue , 1998, Pages 418-423

  Kobrin, Paul H ^a   Seabury, Charles ^a   Linnen, Christopher ^a   Harker, Alan B ^a   Chung, Russell ^b   McGill, Robert A ^c   Matthews, Paul J ^c  

^a ROCKWELL SCIENCE CENTER   (United States)

^b SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Chemical sensor; Mass transducer; SAW; Thin film resonator; TNT; Vapor detection

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; CHEMICAL SENSORS; PIEZOELECTRIC TRANSDUCERS; POLLUTION; REMEDIATION; RESONATORS; THIN FILM DEVICES; THIN FILMS;

ALN; LOW LEVELS; MASS TRANSDUCER; PIEZOELECTRIC LAYERS; SELECTIVE COATINGS; SIGNAL TO NOISE; SOLID SUBSTRATES; SURFACE ACOUSTIC WAVE RESONATORS; THIN FILM RESONATOR; THIN-FILM BULK ACOUSTIC WAVE RESONATORS; TNT; TNT VAPORS; VAPOR DETECTION;

VAPORS;

EID: 37049033368     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324215     Document Type: Conference Paper

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