Ion sputtering of cathode surface in a hollow cathode discharge

Vacuum

Volumn 82, Issue 5, 2008, Pages 455-458

  Bundaleska, Nely ^a   Tomova, Zoritsa ^b   Steflekova, Vasilka ^a   Zhechev, Dimo ^a  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b INSTITUTE FOR NUCLEAR RESEARCH AND NUCLEAR ENERGY   (Bulgaria)

Author keywords

Cathode surface sputtering; Hollow cathode discharge; Screening effect

Indexed keywords

ARGON; CATHODES; ESTIMATION; MONTE CARLO METHODS; SCREENING; SPUTTERING;

BUFFER GAS; CATHODE SURFACE; HOLLOW CATHODE DISCHARGE (HCD); ION SPUTTERING;

DISCHARGE LAMPS;

EID: 37049029177     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.06.004     Document Type: Article

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