A MEMS singlet oxygen generator - Part I: Device fabrication and proof of concept demonstration

Journal of Microelectromechanical Systems

Volumn 16, Issue 6, 2007, Pages 1482-1491

  Velasquez Garcia L F ^a   Hill, Tyrone F ^b   Wilhite, Benjamin A ^d   Jensen, Klavs F ^c   Epstein, Alan H ^c   Livermore, Carol ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b USA   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^d UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

Chemical lasers; Chemical oxygen and iodine laser (COIL); Deep reactive ion etching (DRIE); Etching; Microfluidics; Singlet oxygen; Wafer bonding

Indexed keywords

CHEMICAL LASERS; CHEMICAL REACTORS; HEAT EXCHANGERS; MICROFLUIDICS; MICROPROCESSOR CHIPS; OPTICAL EMISSION SPECTROSCOPY; OXYGEN; PRESSURE DROP; REACTIVE ION ETCHING; WAFER BONDING;

DEEP REACTIVE ION ETCHING; HEAT OF REACTION; SINGLET OXYGEN GENERATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 36949003896     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.902446     Document Type: Article

References (10)

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10. T. F. Hill, L. F. Velásquez-García, B. A. Wilhite, K. F. Jensen, A. H. Epstein, and C. Livermore, "MEMS singlet oxygen generator - Part II: Experimental exploration of the performance space," J. Microelectromech. Syst. to be published.