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Journal of Applied Physics

Volumn 53, Issue 1, 1982, Pages 541-545

Ultraviolet bleaching and regeneration of ·Si≡Si3 centers at the Si/SiO2 interface of thinly oxidized silicon wafers

(3) Caplan, Philip J a Poindexter, Edward H a Morrison, S Roy b

a U S ARMY RESEARCH LABORATORY (United States)

b SRI INTERNATIONAL (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36749119966 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.329915 Document Type: Article

Times cited : (44)

References (15)

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2
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3
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9
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10
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13
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- Morrison, S.R.¹

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- Oren, R.¹ Ghandi, S.K.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.