Electrical properties of laser chemically doped silicon

Applied Physics Letters

Volumn 39, Issue 10, 1981, Pages 825-827

  Deutsch, T F ^a   Ehrlich, D J ^a   Rathman, D D ^a   Silversmith, D J ^a   Osgood Jr , R M ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

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EID: 36749119433     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.92572     Document Type: Article

References (6)