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The Journal of Chemical Physics

Volumn 68, Issue 4, 1977, Pages 1776-1784

Interactions of ion beams with surfaces. Reactions of nitrogen with silicon and its oxides

(4) Taylor, J Ashley a Lancaster, Gerald M a Ignatiev, A a Rabalais, J Wayne a

a UNIVERSITY OF HOUSTON (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36749119112 PISSN: 00219606 EISSN: None Source Type: Journal
DOI: 10.1063/1.435869 Document Type: Article

Times cited : (173)

References (63)

1
- 36849098872
- (1969) J. Chem. Phys , vol.50 , pp. 2991
- Menzinger, M.¹ Wolfgang, R.²

2
- 36849114063
- (1973) J. Chem. Phys , vol.58 , pp. 1741
- LeRoy, R.L.¹ Yencha, A.J.² Menzinger, M.³ Wolfgang, R.⁴

3
- 84950867500
- (1974) J. Chem. Phys , vol.60 , pp. 2568
- Durana, S.¹ LeRoy, R.L.² Menzinger, M.³ Yencha, A.J.⁴

4
- 0343440464
- (1973) Accts. Chem. Res , vol.6 , pp. 65
- Lemmon, R.M.¹

5
- 36849103837
- (1970) Rev. Sci. Instrum , vol.41 , pp. 1012
- Pohlit, H.M.¹ Erwin, W.R.² Reynolds, F.L.³ Lemmon, R.M.⁴ Calvin, M.⁵

6
- 0343876180
- (1969) J. Am. Chem. Soc , vol.91 , pp. 5421
- Pohlit, H.M.¹ Lin, T.H.² Erwin, W.³ Lemmon, R.M.⁴

7
- 33947291514
- (1971) J. Phys. Chem , vol.75 , pp. 2555
- Pohlit, H.M.¹ Lin, T.H.² Erwin, W.³ Lemmon, R.M.⁴

8
- 84950865981
- (1972) J. Chem. Soc. Chem. Commun , vol.1177
- Jenkins, G.M.¹ Wiles, D.R.²

9
- 0004115929
- edited by (Wiley‐Interscience, New York, 1974);
- Techniques and Application of Plasma Chemistry
- Hallahan, J.R.¹ Bell, A.T.²

10
- 84915043978
- (1975) Adv. Electron. Electron Phys , vol.37 , pp. 264
- Namba, S.¹ Masuda, K.²

11
- 49549139409
- (1975) Progr. Solid State Phys , vol.10 , pp. 157
- Cho, A.Y.¹ Arthur, J.R.²

12
- 0016567934
- (1975) Anal. Chem , vol.47 , pp. 1882
- Moses, P.R.¹ Wier, L.² Murray, R.W.³

13
- 0003680984
- (McGraw‐Hill, New York,)
- (1970) Handbook of Thin Film Technology
- Maessel, L.I.¹ Glong, R.²

14
- 0016931907
- (1976) J. Vac. Sci. Technol , vol.13 , pp. 591
- Amano, J.¹ Bryce, P.² Lawson, R.P.W.³

15
- 0040151076
- (1977) Int. J. Mass Spectrom. Ion Phys , vol.23 , pp. 29
- Franchetti, V.¹ Solka, B.H.² Baitinger, W.E.³ Amy, J.W.⁴ Cooks, R.G.⁵

16
- 0346398982
- (1976) Chem. Phys. Lett , vol.44 , pp. 371
- Shepard, A.¹ Hewitt, R.W.² Slusser, G.J.³ Baitinger, W.E.⁴ Cooks, R.G.⁵ Winograd, N.⁶ Delgass, W.N.⁷ Varon, A.⁸ Devant, G.⁹

17
- 0016070147
- (1974) Surf. Sci , vol.43 , pp. 625
- Kim, K.S.¹ Winograd, N.²

18
- 0000538358
- (1974) J. Electron Spectrosc , vol.5 , pp. 351
- Kim, K.S.¹ Baitinger, W.E.² Amy, J.W.³ Winograd, N.⁴

19
- 0006810732
- (1976) Surf. Sci , vol.55 , pp. 285
- Kim, K.S.¹ Baitinger, W.E.² Winograd, N.³

20
- 36149024051
- (1954) Phys. Rev , vol.96 , pp. 336
- Hagstrum, H.D.¹

21
- 0000619781
- (1966) Phys. Rev , vol.150 , pp. 495
- Hagstrum, H.D.¹

22
- 0042762054
- (1960) Phys. Rev , vol.119 , pp. 940
- Hagstrum, H.D.¹

23
- 0042684323
- (1976) Surf. Sci , vol.54 , pp. 197
- Hagstrum, H.D.¹

24
- 84950858143
- Metals, edited by R. F. Bunshah (Wiley, New York,)
- (1972) , pp. 309

25
- 84950850717
- Thermal Corporation, Huntsville, AL.

26
- 84950868455
- Physical Electronics Industries, Inc., Eden Prairie, MI.

27
- 84950898859
- Varian Vacuum Division, Palo Alto, CA.

28
- 33747352146
- (1966) Nature , vol.212 , pp. 1422
- Mcllraith, A.H.¹

29
- 0005077925
- idem,
- (1972) J. Vac. Sci. Technol , vol.9 , pp. 209
- Mcllraith, A.H.¹

30
- 49549149619
- (1974) J. Electron Spectrosc , vol.5 , pp. 783
- Burger, F.¹ Maier, J.P.²

31
- 84950838409
- Spectrosc. Relat. Phenom. (in press).
- Lancaster, G.M.¹ Taylor, J.A.² Rabalais, J.W.³ Electron, J.⁴

32
- 84950748259
- Extranuclear Laboratories, Inc., Pittsburgh, PA.

33
- 84950778334
- Leybold‐Heraeus, Inc., Monroeville, PA.

34
- 6144221741
- (1977) J. Electron Spectrosc , vol.10 , pp. 85
- Carriere, B.¹ Deville, J.P.² Brion, D.³ Escard, J.⁴

35
- 0003328069
- (1976) Chem. Phys. Lett , vol.44 , pp. 225
- Hill, J.M.¹ Royce, D.G.² Fadley, C.S.³ Wagner, L.F.⁴ Grunthaner, F.J.⁵

36
- 0017022556
- (1976) J. Noncryst. Solids , vol.22 , pp. 399
- Stephenson, D.A.¹ Binkowski, N.J.²

37
- 0345986409
- (1975) Chem. Phys. Lett , vol.36 , pp. 441
- Hollinger, G.¹ Jugnet, Y.² Pertosa, P.³ Due, T.M.⁴

38
- 0345804260
- (1975) Chem. Scripta , vol.8 , pp. 162
- Johnson, O.¹

39
- 2342472450
- (1976) Surf. Sci , vol.54 , pp. 506
- Holloway, P.H.¹

40
- 84910806146
- (1976) J. Electrochem. Soc , vol.123 , pp. 1754
- Raider, S.I.¹ Flitsch, R.²

41
- 49349137766
- (1976) Sol. State Commun , vol.20 , pp. 277
- Rowe, J.E.¹ Margaritondo, G.² Ibach, H.³ Froitzheim, H.⁴

42
- 2842597633
- (1975) J. Vac. Sci. Technol , vol.12 , pp. 293
- Traum, M.M.¹ Rowe, J.E.² Smith, N.E.³

43
- 2842597633
- (1975) J. Vac. Sci. Technol , vol.12 , pp. 298
- Traum, M.M.¹ Rowe, J.E.² Smith, N.E.³

44
- 84914537972
- in edited by M. H. Brodsky, S. Kirkpatrick, and D. Weaire (AIP, New York,)
- (1974) Tetrahedrally Bonded Amorphous Semiconductors , pp. 102
- Hollinger, G.¹ Tousset, J.² Duc, T.M.³

45
- 0002886975
- (1975) Faraday Discuss. Chem. Soc , vol.60 , pp. 51
- Brundle, C.R.¹ Carley, A.F.²

46
- 0040552596
- (1977) J. Electron Spectrosc , vol.10 , pp. 137
- Chong, D.P.¹ Takahata, Y.²

47
- 0003244714
- in edited by A. L. Burlingame (Wiley‐Interscience, New York)
- (1970) Topics in Organic Mass Spectroscopy
- La Lau, C.¹

48
- 0002442645
- (1961) Phys. Rev , vol.122 , pp. 83
- Hagstrum, H.D.¹

49
- 0017271379
- (1976) Proc. R. Soc. London Ser. A , vol.352 , pp. 289
- Kishi, K.¹ Roberts, M.W.²

50
- 0013197462
- (1977) Surf. Sci , vol.62 , pp. 252
- Kishi, K.¹ Roberts, M.W.²

51
- 0016421466
- (1976) J. Vac. Sci. Technol , vol.13 , pp. 301
- Brundle, C.R.¹

52
- 49349132275
- (1977) J. Electron Spectrosc , vol.10 , pp. 125
- Honda, F.¹ Hirokawa, K.²

53
- 0043185397
- (1972) J. Appl. Phys , vol.43 , pp. 4809
- Winters, H.F.¹

54
- 0016127457
- (1974) J. Appl. Phys , vol.45 , pp. 4760
- Winters, H.F.¹ Sigmund, P.²

55
- 0015019316
- (1971) Surf. Sci , vol.24 , pp. 587
- Winters, H.F.¹ Horne, D.E.²

56
- 0002606006
- 73
- (1972) J. Electron Spectrosc , vol.1 , pp. 161
- Carlson, T.A.¹ McGuire, G.E.²

57
- 0016015486
- (1975) J. Vac. Sci. Technol , vol.12 , pp. 305
- Flitsch, R.¹ Raider, S.I.²

58
- 0342763255
- (1974) J. Electron Spectrosc , vol.3 , pp. 427
- Klasson, M.¹ Berndtsson, A.² Hedman, J.³ Nilson, R.⁴ Nyholm, R.⁵ Nordling, C.⁶

59
- 0000385015
- (1972) Surf. Sci , vol.32 , pp. 703
- Seah, M.P.¹

60
- 0041742046
- (1976) J. Electron Spectrosc , vol.8 , pp. 129
- Scofield, J.H.¹

61
- 84950875119
- The projected range is defined as the mean penetration depth for ions traveling normal to the surface.

62
- 0003456026
- (Academic, New York)
- (1976) Ion Implantation, Sputtering and Their Applications
- Townsend, P.D.¹ Kelly, J.C.² Hartley, N.E.W.³

63
- 84950912996
- in Vol. 1, edited by A. W. Czanderna(Elsevier, New York),
- (1975) Methods of Surface Analysis , pp. 14-25
- Wehner, G.K.¹

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