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Applied Physics Letters

Volumn 41, Issue 3, 1982, Pages 251-253

Defects and impurities in thermal oxides on silicon

(3) Brower, K L a Lenahan, P M a Dressendorfer, P V a

a SANDIA NATIONAL LABORATORIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36749117035 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.93484 Document Type: Article

Times cited : (89)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.