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Volumn 15, Issue 24, 2007, Pages 16285-16291

Encapsulation of low-refractive-index SiO2 nanorods by Al 2O3 with atomic layer deposition

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; BRAGG REFLECTORS; ENCAPSULATION; OPTICAL COATINGS; REFRACTIVE INDEX; SILICA; THIN FILMS;

EID: 36749104212     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.016285     Document Type: Article
Times cited : (18)

References (12)
  • 2
  • 3
    • 34047256843 scopus 로고    scopus 로고
    • Distributed Bragg reflector consisting of highand low-refractive-index thin film layers made of the same material
    • M. F. Schubert, J.-W. Xi, J. K. Kim, and E. F. Schubert, "Distributed Bragg reflector consisting of highand low-refractive-index thin film layers made of the same material," Appl. Phys. Lett. 90, 141115-141117 (2007).
    • (2007) Appl. Phys. Lett , vol.90 , pp. 141115-141117
    • Schubert, M.F.1    Xi, J.-W.2    Kim, J.K.3    Schubert, E.F.4
  • 4
    • 34547619183 scopus 로고    scopus 로고
    • Ultralow-dielectric-constant optical thin films built from magnesium oxyftuoride vesicle-like hollow nanoparticles
    • D. Grosso, C Boissiere, and C Sanchez, "Ultralow-dielectric-constant optical thin films built from magnesium oxyftuoride vesicle-like hollow nanoparticles," Nat. Mater. 6, 572-575 (2007).
    • (2007) Nat. Mater , vol.6 , pp. 572-575
    • Grosso, D.1    Boissiere, C.2    Sanchez, C.3
  • 5
    • 4344573246 scopus 로고    scopus 로고
    • 8)-Based Micromachined Negative Thermal-Expansion Thin Films
    • 8)-Based Micromachined Negative Thermal-Expansion Thin Films," J. MEMS 13, 688-695 (2004).
    • (2004) J. MEMS , vol.13 , pp. 688-695
    • Michael, S.1
  • 6
    • 0036602915 scopus 로고    scopus 로고
    • Thermally invariant dielectric coatings for micromirrors
    • W. Liu and J. J. Talghader, "Thermally invariant dielectric coatings for micromirrors," Appl. Opt. 41 3285-3293 (2002).
    • (2002) Appl. Opt , vol.41 , pp. 3285-3293
    • Liu, W.1    Talghader, J.J.2
  • 7
    • 0020748448 scopus 로고
    • The temperature dependence of the refractive indices of fused silica and crystal, quartz
    • T Toyoda and M Yabe, "The temperature dependence of the refractive indices of fused silica and crystal, quartz," J. Phys. D 16. L97-L100 (1983).
    • (1983) J. Phys. D , vol.16
    • Toyoda, T.1    Yabe, M.2
  • 10
    • 0030284420 scopus 로고    scopus 로고
    • Introducing atomic layer epitaxy for the deposition of optical, thin films
    • D. Riihela, M. Ritala, R. Matero, and M. Leskela, "Introducing atomic layer epitaxy for the deposition of optical, thin films," Thin Solid Films 289, 250-255 (1996)
    • (1996) Thin Solid Films , vol.289 , pp. 250-255
    • Riihela, D.1    Ritala, M.2    Matero, R.3    Leskela, M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.