SCOPUS 정보 검색 플랫폼

Volumn 54, Issue 18, 1989, Pages 1748-1750

Effect of back-surface polycrystalline silicon layer on oxygen precipitation in Czochralski silicon wafers

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549104216 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.101279 Document Type: Article

Times cited : (16)

References (20)

1
- 84912637240
- edited by W. M. Bullis and L. C. Kimerling (Electrochemical Society, Pennington, NJ)
- (1983) Defects in Silicon , pp. 433
- Hill, D.E.¹

4
- 0020881268
- edited by W. M. Bullis and L. C. Kimerling (Electrochemical Society, Pennington, NJ)
- (1983) Defects in Silicon , pp. 423
- Stacy, W.T.¹ Arst, M.C.² Ritz, K.N.³ de Groot, J.G.⁴ Norcott, M.H.⁵

9
- 0010270264
- edited by C. J. Dell’Oca and W. M. Bullis (Electrochemical Society, Pennington, NJ)
- (1982) VLSI Science and Technology/1982 , pp. 17
- Shimura, F.¹

12
- 5244290137
- edited by H. R. Huff, H. J. Kriegler, and Y. Takeishi (Electrochemical Society, Pennington, NJ)
- (1981) Semiconductor Silicon 1981 , pp. 743
- Takano, Y.¹ Kozuka, H.² Ogirima, M.³ Maki, M.⁴

13
- 0020180211
- (1982) J. Electrochem. Soc , vol.129 , pp. 2089
- Shimura, F.¹ Tsuya, H.²

15
- 84952848440
- edited by H. R. Huff and E. Sirtl (Electrochemical Society, Pennington, NJ)
- (1981) Semiconductor Silicon 1977 , pp. 4
- Sirtl, E.¹

16
- 0042622069
- edited by W. M. Bullis and S. Broydo (Electrochemical Society, Pennington, NJ)
- (1985) VLSI Science and Technology/1985 , pp. 507
- Shimura, F.¹ Dyson, W.² Moody, J.W.³ Hockett, R.S.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.