Study of thermally oxidized yttrium films on silicon

Applied Physics Letters

Volumn 51, Issue 12, 1987, Pages 919-921

  Gurvitch, M ^a   Manchanda, L ^a   Gibson, J M ^a  

^a LUCENT TECHNOLOGIES   (United States)

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EID: 36549102892     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.98801     Document Type: Article

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