Stress and microstructure of sputter-deposited thin films: Molecular dynamics investigations

Journal of Applied Physics

Volumn 62, Issue 5, 1987, Pages 1796-1799

  Müller, Karl Heinz ^a  

^a CSIRO INDUSTRIAL PHYSICS   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549102302     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.339559     Document Type: Article

References (0)