Titanium dioxide dielectric films formed by rapid thermal oxidation

Journal of Applied Physics

Volumn 65, Issue 5, 1989, Pages 2095-2097

  Burns, G P ^a  

^a PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549102221     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.342856     Document Type: Article

References (7)