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The Journal of Chemical Physics

Volumn 91, Issue 4, 1989, Pages 2627-2634

Laser studies of the reactivity of SiH with the surface of a depositing film

(3) Ho, Pauline a Breiland, William G a Buss, Richard J a

a SANDIA NATIONAL LABORATORIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549100403 PISSN: 00219606 EISSN: None Source Type: Journal
DOI: 10.1063/1.456971 Document Type: Article

Times cited : (82)

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