Generation of soft x rays using a rare gas-hydrogen plasma focus and its application to x-ray lithography

Applied Physics Letters

Volumn 48, Issue 11, 1986, Pages 686-688

  Kato, Y ^a   Be, S H ^b  

^a HITACHI LTD   (Japan)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

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EID: 36549099886     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.96743     Document Type: Article

References (8)