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Journal of Applied Physics

Volumn 58, Issue 1, 1985, Pages 535-540

Hydrogen content of amorphous silicon films deposited in a multipole plasma

(2) Drevillon, B a Toulemonde, M b

a ECOLE POLYTECHNIQUE (France)

b Centre de Recherches Nucleaires (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549098278 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.335658 Document Type: Article

Times cited : (24)

References (41)

1
- 0014577283
- (1969) Phys. Rev. Lett. , vol.23 , pp. 581
- Brodsky, M.H.¹ Title, R.S.²

2
- 33745935178
- (1977) Phys. Rev. B , vol.16 , pp. 3556
- Brodsky, M.H.¹ Cardona, M.² Cuomo, J.J.³

3
- 0017957893
- (1978) Philos. Mag. B , vol.37 , pp. 467
- Knights, J.C.¹ Lucovsky, G.² Nedmanich, R.J.³

4
- 0005364093
- (1983) Appl. Phys. Lett. , vol.42 , pp. 801
- Drevillon, B.¹ Perrin, J.² Siefert, J.M.³ Huc, J.⁴ Lloret, A.⁵ de Rosny, G.⁶ Schmitt, J.P.M.⁷

5
- 3743090181
- (1981) Phys. Rev. B , vol.23 , pp. 2567
- Reimer, J.A.¹ Vaughan, R.W.² Knights, J.C.³

6
- 0019437764
- (1981) Solid State Commun. , vol.37 , pp. 161
- Reimer, J.A.¹ Vaughan, R.W.² Knights, J.C.³

7
- 3743081382
- (1980) Phys. Rev. Lett. , vol.45 , pp. 358
- Carlos, W.E.¹ Taylor, P.C.²

8
- 0020910603
- (1983) J. Non‐Cryst. Solids , vol.59-60 , pp. 109
- Taylor, P.C.¹

9
- 84950907088
- (1982) Solar Energy Mater. , vol.8 , pp. 215
- Chen, K.J.¹ Fritzsche, H.²

10
- 41149125354
- (1981) J. Phys. (Paris) , vol.42 , pp. C4-783
- Beyer, W.¹ Wagner, H.²

11
- 0001204628
- (1981) Phys. Rev. B , vol.23 , pp. 6648
- Zellama, K.¹ Germain, P.² Squelard, S.³ Bourdon, B.⁴ Fontenille, J.⁵ Danielou, R.⁶

12
- 35949039833
- (1979) Phys. Rev. B , vol.20 , pp. 4839
- Biegelsen, D.K.¹ Street, R.A.² Tsai, C.C.³ Knights, J.C.⁴

13
- 0018809557
- (1979) Thin Solid Films , vol.63 , pp. 189
- Mc Millan, J.A.¹ Pekison, E.M.²

14
- 41149092862
- (1981) J. Phys. (Paris) , vol.42 , pp. C4-779
- Demond, F.J.¹ Muller, G.² Damjantschitsch, H.³ Mannsperger, H.⁴ Kalbitzer, S.⁵ Le Comber, P.G.⁶ Spear, W.E.⁷

15
- 0018738238
- (1979) Philos. Mag. B , vol.40 , pp. 433
- von Roedern, B.¹ Ley, L.² Cardona, M.³ Smith, F.W.⁴

16
- 0000663726
- (1980) Appl. Phys. Lett. , vol.37 , pp. 646
- Drevillon, B.¹ Hue, J.² Lloret, A.³ Perrin, J.⁴ de Rosny, G.⁵ Schmitt, J.P.M.⁶

17
- 0001503719
- (1982) Chem. Phys. , vol.73 , pp. 383
- Perrin, J.¹ Schmitt, J.P.M.² de Rosny, G.³ Drevillon, B.⁴ Hue, J.⁵ Lloret, A.⁶

18
- 0020949383
- (1983) J. Non‐Cryst. Solids , vol.59-60 , pp. 735
- Drevillon, B.¹ Hue, J.² Boussarssar, N.³

19
- 0001557121
- (1976) Appl. Phys. Lett. , vol.28 , pp. 566
- Lanford, W.A.¹ Trautvetter, H.P.² Ziegler, J.F.³ Keller, J.⁴

20
- 36749111128
- (1977) Appl. Phys. Lett. , vol.30 , pp. 561
- Brodsky, M.H.¹ Frisch, M.A.² Ziegler, J.F.³ Landford, W.A.⁴

21
- 0018470344
- (1979) J. Appl. Phys. , vol.50 , pp. 3366
- Fritzsche, H.¹ Tanielian, M.² Tsai, C.C.³ Gaczi, P.J.⁴

22
- 0042301112
- (1979) Appl. Phys. Lett. , vol.34 , pp. 173
- Milleville, M.¹ Fuhs, W.² Demond, F.J.³ Mannsperger, H.⁴ Muller, G.⁵ Kalbitzer, S.⁶

23
- 0018529731
- (1979) Thin Solid Films , vol.62 , pp. 327
- Perrin, J.¹ Solomon, I.² Bourdon, B.³ Fontenille, J.⁴ Ligeon, E.⁵

24
- 0018454571
- (1979) J. Electrochem. Soc. , vol.126 , pp. 688
- Carlson, D.E.¹ Magee, C.W.² Triano, A.R.³

25
- 0020888724
- (1983) Philos. Mag. B , vol.48 , pp. 571
- Tardy, J.¹ Meaudre, R.²

26
- 0018530869
- (1979) Philos. Mag. B , vol.40 , pp. 291
- Ewald, D.¹ Milleville, M.² Weiser, G.³

27
- 0000871728
- (1979) Phys. Rev. B , vol.20 , pp. 716
- Freeman, E.C.¹ Paul, W.²

28
- 0344546830
- (1976) AIP Conf. Proc. , vol.31 , pp. 296
- Knights, J.C.¹

29
- 84950824192
- (1981) J. Phys. (Paris) , vol.42 , pp. C4-795
- Brassard, C.¹ Groleau, R.² L’Ecuyer, J.³ Martin, J.P.⁴ Currie, J.F.⁵ Depelsenaire, F.⁶ Wertheimer, M.⁷ Yelon, A.⁸

30
- 0003102725
- (1978) Appl. Phys. Lett. , vol.33 , pp. 81
- Carlson, D.E.¹ Magee, C.W.²

31
- 84950804481
- (1983) J. Phys. (Paris) C10‐247
- Perrin, J.¹ Drevillon, B.²

32
- 84862380052
- (to be published)
- Thin Solid films
- Drevillon, B.¹

33
- 0020156599
- For a critical review of ion‐surface interactions, see
- (1982) J. Vac. Sci. Technol. , vol.21 , pp. 285
- Greene, J.E.¹ Barnett, S.A.²

34
- 0020186258
- (1982) J. Appl. Phys. , vol.53 , pp. 6220
- Messier, R.¹ Ross, R.C.²

35
- 0020913305
- (1983) J. Appl. Phys. , vol.54 , pp. 6853
- Scott, B.A.¹ Reimer, J.A.² Longeway, P.A.³

36
- 0020949385
- and references therein
- (1983) J. Non‐Cryst. Solids , vol.59-60 , pp. 649
- Schmitt, J.P.M.¹

37
- 84914221794
- edited by B. Waldie and J. A. Farnell (Herriot‐Watt University, Edinburgh)
- (1981) Proceedings of the 5th International Symposium on Plasma Chemistry , pp. 488
- Drevillon, B.¹ Hue, J.² Lloret, A.³ Perrin, J.⁴ de Rosny, G.⁵ Schmitt, J.P.M.⁶

38
- 0020914176
- (1983) J. Non‐Cryst. Solids , vol.59-60 , pp. 161
- Beyer, W.E.¹ Wagner, H.²

39
- 33744574721
- (1981) Phys. Rev. B , vol.24 , pp. 3360
- Reimer, J.A.¹ Vaughan, R.W.² Knights, J.C.³

40
- 4243549295
- (1980) Phys. Rev. Lett. , vol.45 , pp. 648
- Postal, T.A.¹ Falco, C.M.² Kampwirth, R.T.³ Schuller, I.K.⁴

41
- 0020186261
- (1982) J. Appl. Phys. , vol.53 , pp. 6408
- Kampas, F.J.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.