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Volumn 64, Issue 11, 1988, Pages 6515-6522
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Theory for the plasma anodization of silicon under constant voltage and constant current conditions
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 36549097841
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.342076 Document Type: Article |
Times cited : (35)
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References (24)
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