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Journal of Applied Physics

Volumn 68, Issue 5, 1990, Pages 2415-2423

Platinum metal etching in a microwave oxygen plasma

(2) Chou, C H a Phillips, J a

a PENNSYLVANIA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549095500 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.346501 Document Type: Article

Times cited : (30)

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