Simple low-energy sputter ion gun based on a Bayard-Alpert pressure gauge

Review of Scientific Instruments

Volumn 57, Issue 10, 1986, Pages 2640-2642

  Kirschner, J ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

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EID: 36549095215     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1139076     Document Type: Article

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