메뉴 건너뛰기




Volumn 63, Issue 8, 1988, Pages

Rapid isothermal processing

Author keywords

[No Author keywords available]

Indexed keywords


EID: 36549095157     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.340176     Document Type: Article
Times cited : (215)

References (565)
  • 13
    • 84950924306 scopus 로고    scopus 로고
    • Electrical and Electronics Abstracts, Science Abstracts Series B, IN-SPEC, The Institution of Electrical and Electronic Engineers, Inc. (IEEE, Piscataway, NJ, 08854-4150).
  • 18
    • 84950770971 scopus 로고
    • Proceedings of the 5th International Conference on Ion Implantation Equipment and Techniques, Vermont, July 23–27, 1984, Varian Semiconductor Equipment Group Report No. 69
    • (1984)
    • Russo, C.1
  • 36
    • 84950810765 scopus 로고    scopus 로고
    • Eaton Corporation, Beverly, MA 01915.
  • 37
    • 84950849008 scopus 로고    scopus 로고
    • Peak Systems, Fremont, CA 94538.
  • 38
    • 84950886466 scopus 로고    scopus 로고
    • Tamarack Scientific Company, Anaheim, CA 92806.
  • 39
    • 84950838594 scopus 로고    scopus 로고
    • Varian Associates, Exterion Division, Glouchester, MA 01930.
  • 46
    • 84950542711 scopus 로고
    • Materials Research Society Symposia Proceedings, edited by T. O. Sedgwick, T. E. Seidel, and B. Y. Tsaur (Materials Research Society, Pittsburgh, PA), Vol. 52.
    • (1986) Rapid Thermal Processing , pp. 191
    • Sheets, R.E.1
  • 59
    • 22244442231 scopus 로고
    • Materials Research Society Symposia Proceedings, edited by T. O. Sedgwick, T. E. Seidel, and B. Y. Tsaur (Materials Research Society, Pittsburgh, PA), Vol. 52.
    • (1986) Rapid Thermal Processing , pp. 3
    • Michel, A.E.1
  • 121
    • 84950855864 scopus 로고
    • Materials Research Society Symposia Proceedings, edited by T. O. Sedgwick, T. E. Seidel, and B. Y. Tsaur (Materials Research Society, Pittsburgh, PA), Vol. 52.
    • (1986) Rapid Thermal Processing , pp. 335
    • Narayan, J.1
  • 225
    • 0023011685 scopus 로고
    • Materials Research Society Symposia Proceedings, edited by T. O. Sedgwick, T. E. Seidel, and B. Y. Tsaur (Materials Research Society, Pittsburgh, PA), Vol. 52.
    • (1986) Rapid Thermal Processing , pp. 403
    • Lam, C.S.1    Fonstad, C.G.2
  • 335
    • 84950809775 scopus 로고    scopus 로고
    • “Obmic Contacts to Silicon,” Heatpulse Application Note, A. G. Associates, Sunnyvale, CA (1986).
  • 406
    • 84950917120 scopus 로고    scopus 로고
    • “Silicide Formation by Rapid Thermal Annealing,” Heatpulse Application Note, A. G. Associates, Sunnyvale, CA (1986).
  • 447
  • 459
    • 84950928061 scopus 로고
    • Electrochemical Society Spring Meeting, Boston, MA, May 4–9), Vol. 86-1, Abstract No. 259.
    • (1986) Extended Abstracts , pp. 378
    • Nulman, J.1
  • 476
    • 84950818694 scopus 로고
    • “Announcement on Rapid Thermal Oxidation,” Jan. 20.
    • (1986)
    • Associates, A.G.1
  • 509
    • 84950779651 scopus 로고    scopus 로고
    • “Oxide Reflow,” Heatpulse Application Note, A. G. Associates, CA (Jan. 1986).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.