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Volumn 57, Issue 2, 1985, Pages 418-425

The effect of gate metal and SiO2 thickness on the generation of donor states at the Si-SiO2 interface

Author keywords

[No Author keywords available]

Indexed keywords


EID: 36549094375     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.334767     Document Type: Article
Times cited : (104)

References (44)
  • 32
    • 84950808230 scopus 로고
    • Generation of Interface States and Charge trapping in MOSFETs
    • presented at the Workshop on the Physics of Submicron Devices, Urbana, Illinois, June
    • (1982)
    • Hofmann, K.R.1    Dorda, O.2
  • 37
    • 84950811396 scopus 로고    scopus 로고
    • The less efficient process of direct generation of electron‐hole pairs in the anode and the direct breaking of stressed bonds in the [formula omitted] by the hot electrons may account for the much slower generation of positive charge in thin [formula omitted] layers at lower gate voltage [formula omitted] reported in Ref. 15.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.