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The Journal of Chemical Physics

Volumn 84, Issue 5, 1985, Pages 2668-2674

Studies of atomic oxygen in O2+CF4 rf discharges by two-photon laser-induced fluorescence and optical emission spectroscopy

(3) Walkup, R E a Saenger, K L a Selwyn, G S a,b

a IBM T J WATSON RESEARCH CENTER (United States)

b IBM (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549094168 PISSN: 00219606 EISSN: None Source Type: Journal
DOI: 10.1063/1.450339 Document Type: Article

Times cited : (255)

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