Ion-induced electrical breakdown in metal-insulator-silicon capacitors

Journal of Applied Physics

Volumn 68, Issue 4, 1990, Pages 1808-1814

  Milgram, Alvin A ^a   Franco, Edward D ^a  

^a Advanced Research & Applications Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549092556     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.346614     Document Type: Article

References (9)