Epitaxial growth and electric characteristics of cubic SiC on silicon

Journal of Applied Physics

Volumn 61, Issue 10, 1987, Pages 4889-4893

  Nishino, Shigehiro ^a   Suhara, Hajime ^a   Ono, Hideyuki ^a   Matsunami, Hiroyuki ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

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Indexed keywords

EID: 36549091052     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.338355     Document Type: Article

References (13)