Stress manipulation in ferroelectric thin films and superlattices

Vibrational Spectroscopy

Volumn 45, Issue 2, 2007, Pages 108-111

  Katiyar, R S ^a   Yuzyuk, Yu I ^b  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

^b SOUTHERN FEDERAL UNIVERSITY   (Russian Federation)

Author keywords

Ferroelectrics; Raman spectroscopy; Superlattices

Indexed keywords

FERROELECTRIC MATERIALS; MICROELECTRONICS; RAMAN SPECTROSCOPY; STRESS ANALYSIS; SUPERLATTICES; THERMAL EXPANSION; THIN FILMS;

EPITAXIAL THIN FILMS; FERROELECTRIC OXIDES; MICROELECTRONIC DEVICES; THERMAL EXPANSION COEFFICIENTS;

FERROELECTRICITY;

EID: 36549049904     PISSN: 09242031     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vibspec.2007.05.004     Document Type: Article

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