A comparative study of the vibrational and luminescence properties of embedded Ge nanocrystals prepared by ion implantation and sputter deposition methods: Role of strain and defects

Semiconductor Science and Technology

Volumn 22, Issue 12, 2007, Pages 1332-1338

  Giri, P K ^a   Bhattacharyya, S ^a   Das, Kaustuv ^b   Roy, S K ^b   Kesavamoorthy, R ^c   Panigrahi, B K ^c   Nair, K G M ^c  

^a INDIAN INSTITUTE OF TECHNOLOGY GUWAHATI   (India)

^b INDIAN INSTITUTE OF TECHNOLOGY   (India)

^c INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; ION IMPLANTATION; MOLECULAR VIBRATIONS; PHOTOLUMINESCENCE; POLARIZATION; SPUTTER DEPOSITION;

EMBEDDED NANOCRYSTALS; EMISSION BANDS; LUMINESCENCE PROPERTIES; POST-DEPOSITION ANNEALING;

NANOCRYSTALS;

EID: 36549030341     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/22/12/017     Document Type: Article

References (37)

1. Min K S, Shcheglov K V, Yang C M, Atwater M A, Brongersma M L and Polman A 1996 Appl. Phys. Lett. 68 2511
2. Wu X L, Gao T, Siu G G, Tong S and Bao X M 1999 Appl. Phys. Lett. 74 2420
3. Maeda Y 1995 Phys. Rev. B 51 1658
4. Takeoka S, Fujii M, Hayashi S and Yamamoto K 1998 Phys. Rev. B 58 7921
5. Singha A, Roy A, Kabiraj D and Kanjilal D 2006 Semicond. Sci. Technol. 21 1691
6. Torchynska T V, Aguilar-Hernandeza J, Schacht Hernndeza L, Polupana G, Goldstein Y, Many A, Jedrzejewski J and Kolobov A 2003 Microelectron. Eng. 66 83
7. Das K, Goswami M N, Mahapatra R, Kar G S, Dhar A, Acharya H N, Maikap S, Lee J-H and Ray S K 2004 Appl. Phys. Lett. 84 1386
8. Kartopua G, Bayliss S C, Hummel R E and Ekinci Y 2004 J. Appl. Phys. 95 3466
9. Rebohle L, von Borany J, Yankov R A, Skorupa W, Tyschenko I E, Fröb H and Leo K 1997 Appl. Phys. Lett. 71 2809
10. Skorupa W, Yankov R A, Rebohle L, Frob H, Bohme T, Leo K, Tyschenko I E and Kachurin G A 1996 Nucl. Instrum. Methods B 120 106
11. Sahoo P K, Dhar S, Gasiorek S and Lieb K P 2004 J. Appl. Phys. 96 1392
12. Liao L S, Bao X M, Zheng X Q, Li N S and Min N B 1996 Appl. Phys. Lett. 68 850
13. Meinardi F and Paleari A 1998 Phys. Rev. B 58 3511
14. Zacharias M and Fauchet P M 1997 Appl. Phys. Lett. 71 380
15. Kanimetsu Y, Uto H, Masumoto Y and Maeda Y 1992 Appl. Phys. Lett. 61 2187
16. Cheung A, Azevedo G de M, Glover C J, Llewellyn D J, Elliman R G, Foran G J and Ridgway M C 2004 Appl. Phys. Lett. 84 278
17. Choi W K, Chew H G, Zheng F, Chim W K, Foo Y L and Fitzgerald E A 2006 Appl. Phys. Lett. 89 113126
18. Wellner A, Paillard V, Bonafos C, Coffin H, Claverie A, Schmidt B and Heinig K H 2003 J. Appl. Phys. 94 5639
19. Wu X L, Gao T, Bao X M, Yan F, Jiang S S and Feng D 1997 J. Appl. Phys. 82 2704
20. Sharp I D, Xu Q, Yi D O, Yuan C W, Beeman J W, Yu K M, Ager J W III, Chrzan D C and Haller E E 2006 J. Appl. Phys. 100 114317
21. Duval E, Boukenter A and Champagnon B 1986 Phys. Rev. Lett. 56 2052
22. Teo K L, Kwok S H, Yu P Y and Guha S 2000 Phys. Rev. B 62 1584
23. Fujii M, Nagareda T, Hayashi S and Yamamoto K 1991 Phys. Rev. B 44 6243
24. Tanaka A, Onari S and Arai T 1993 Phys. Rev. B 47 1237
25. Lamb H 1882 Proc. London Math. 13 189
26. Cheng W, Ren S and Yu P Y 2003 Phys. Rev. B 68 193309
27. Giri P K, Kesavamoorthy R, Panigrahi B K and Nair K G M 2005 Solid State Commun. 136 36
28. Yang Y M, Yang L W and Chu P K 2007 Appl. Phys. Lett. 90 081909
29. Alosno M I and Winer K 1989 Phys. Rev. B 39 10056
30. Richter H, Wang J P and Ley L 1981 Solid State Commun. 39 625
31. Campbell I H and Fauchet P M 1986 Solid State Commun. 58 739
32. Das K, Goswami M N L, Dhar A, Mathur B K and Ray S K 2007 Nanotechnology 18 175301
33. Lopes J M J, Zawislak F C, Behar M, Fichtner P F P, Rebohle L and Skorupa W 2003 J. Appl. Phys. 94 6059
34. Yadav H K, Gupta V, Sreenivas K, Singh S P, Sundarakannan B and Katiyar R S 2006 Phys. Rev. Lett. 97 085502
35. Ovsyuk N N, Gorokhov E B, Grischenko V V and Shebanin A P 1988 JETP Lett. 47 298
36. Giri P K, Kesavamoorthy R, Panigrahi B K and Nair K G M 2005 Solid State Commun. 133 229
37. Giri P K, Kesavamoorthy R, Bhattacharya S, Panigrahi B K and Nair K G M 2006 Mater. Sci. Eng. B 128 201