Deposition of extremely thin (Ba,Sr)TiO3 thin films for ultra-large-scale integrated dynamic random access memory application

Applied Physics Letters

Volumn 67, Issue , 1995, Pages 2819-

  Hwang, Cheol Seong ^a   Park, Soon Oh ^a   Cho, Hag Ju ^a   Kang, Chang Suk ^a   Kang, Ho Kyu ^a   Lee, Sang In ^a   Lee, Moon Yong ^a  

^a SAMSUNG Electronics   (South Korea)

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EID: 36449009699     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.114795     Document Type: Article

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