Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films

Journal of Applied Physics

Volumn 78, Issue 12, 1995, Pages 7289-7294

  Choi, W K ^a   Loo, F L ^a   Ling, C H ^a   Loh, F C ^a   Tan, K L ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449009128     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.360377     Document Type: Article

References (20)