Numerical simulation of plasma sheath expansion, with applications to plasma-source ion implantation

Journal of Applied Physics

Volumn 71, Issue 1, 1992, Pages 113-117

  Emmert, G A ^a   Henry, M A ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449008738     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.350740     Document Type: Article

References (12)