The onset of secondary phase precipitation during synthesis of heteroepitaxial Si1-x-yGexCy on Si(100)

Applied Physics Letters

Volumn , Issue , 1995, Pages 782-

  Herbots, Nicole ^a   Ye, Peihua ^a   Jacobsson, Harald ^a   Xiang, Joan ^a   Hearne, Sean ^a   Cave, Nigel ^b  

^a ARIZONA STATE UNIVERSITY   (United States)

^b MOTOROLA INC   (United States)

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EID: 36449008384     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116531     Document Type: Article

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