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Journal of Applied Physics

Volumn 73, Issue 5, 1993, Pages 2163-2172

Spatiotemporal optical emission spectroscopy of rf discharges in SF 6

(4) Petrović, Zoran Lj a Tochikubo, Fumiyoshi a Kakuta, Shigeru a Makabe, Toshiaki a

a KEIO UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449007624 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.353118 Document Type: Article

Times cited : (73)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.