SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Physics Letters

Volumn 62, Issue 25, 1993, Pages 3348-3350

Optical functions of chemical vapor deposited thin-film silicon determined by spectroscopic ellipsometry

(3) Jellison Jr , G E a Chisholm, M F a Gorbatkin, S M a

a OAK RIDGE NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449006678 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.109067 Document Type: Article

Times cited : (253)

References (18)

1
- 0002916138
- (1981) Appl. Phys. Lett. , vol.38 , pp. 56
- Bagley, B.G.¹ Aspnes, D.E.² Adams, A.C.³ Mogab, C.J.⁴

2
- 0018986239
- (1981) J. Vac. Sci. Technol. , vol.18 , pp. 289
- Aspnes, D.E.¹

3
- 0000683257
- (1984) Phys. Rev. B , vol.29 , pp. 768
- Aspnes, D.E.¹ Studna, A.A.² Kinsbron, E.³

4
- 36549102218
- (1985) Appl. Phys. Lett. , vol.47 , pp. 339
- Vedam, K.¹ McMarr, P.J.² Narayan, J.³

5
- 0000295780
- (1985) J. Appl. Phys. , vol.57 , pp. 4566
- Collins, R.W.¹ Clark, A.H.² Guha, S.³ Huang, C.-Y.⁴

6
- 0000361527
- (1986) J. Appl. Phys. , vol.60 , pp. 1542
- Kumar, S.¹ Drevillon, B.² Godet, C.³

7
- 0347857491
- (1986) Appl. Phys. Lett. , vol.50 , pp. 1651
- Drevillon, B.¹ Godet, C.² Kumar, S.³

8
- 36549092017
- (1989) J. Appl. Phys. , vol.65 , pp. 2416
- Logothetidis, S.¹

9
- 0026812385
- (1992) Surf. Interface Anal. , vol.18 , pp. 113
- Snyder, P.G.¹ Xiong, Y.M.² Woollam, J.A.³ Krosche, E.R.⁴ Strausser, Y.⁵

10
- 84980703555
- (1935) Ann. Phys. (Leipzig) , vol.24 , pp. 636
- Bruggeman, D.A.G.¹

11
- 84975655373
- (1991) Appl. Opt. , vol.30 , pp. 3354
- Jellison, G.E.¹

12
- 84975659848
- (1990) Appl. Opt. , vol.29 , pp. 959
- Jellison, G.E.¹ Modine, F.A.²

13
- 0026461497
- (1992) Opt. Mater. , vol.1 , pp. 41
- Jellison, G.E.¹

14
- 0004040706
- edited by E. D. Palik (Academic, New York), p. 571
- (1985) Handbook of Optical Constants of Solids
- Piller, H.¹

15
- 0001656628
- (1991) J. Appl. Phys. , vol.69 , pp. 7627
- Jellison, G.E.¹

16
- 0009260463
- (1986) Phys. Rev. B , vol.34 , pp. 7018
- Forouhi, A.R.¹ Bloomer, I.²

17
- 0142166825
- (1987) Phys. Rev. , vol.36 , pp. 4821
- Lautenschlager, P.¹ Garriga, M.² Vina, L.³ Cardona, M.⁴

18
- 0001257155
- (1978) Phys. Rev. B , vol.18 , pp. 1824
- Daunois, A.¹ Aspnes, D.E.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.