Counter-oxidation of superficial Si in single-crystalline Si on SiO 2 structure

Applied Physics Letters

Volumn 65, Issue 23, 1994, Pages 2987-2989

  Takahashi, Yasuo ^a   Ishiyama, Toshihiko ^a   Tabe, Michiharu ^a  

^a NTT CORPORATION   (Japan)

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EID: 36449006261     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.112485     Document Type: Article

References (11)