Polycrystalline silicon oxidation method improving surface roughness at the oxide/polycrystalline silicon interface

Applied Physics Letters

Volumn , Issue , 1995, Pages 2206-

  Jun, Myung Chul ^a   Kim, Yong Sang ^a   Han, Min Koo ^a   Kim, Jin Won ^a   Kim, Ki Bum ^a  

^a Seoul National University   (South Korea)

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[No Author keywords available]

Indexed keywords

EID: 36449005885     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.113948     Document Type: Article

References (7)