Separation and analysis of diffusion and generation components of pn junction leakage current in various silicon wafers

Journal of Applied Physics

Volumn 75, Issue 7, 1994, Pages 3548-3552

  Murakami, Yoshio ^a   Shingyouji, Takayuki ^a  

^a MITSUBISHI MATERIALS CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449005856     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.356091     Document Type: Article

References (0)