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Journal of Applied Physics

Volumn 71, Issue 2, 1992, Pages 898-906

Micro-Raman study of stress distribution in local isolation structures and correlation with transmission electron microscopy

(5) De Wolf, I a Vanhellemont, J a Romano Rodriguez A a Norstrom H a Maes, H E a

a IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449005810 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.351311 Document Type: Article

Times cited : (131)

References (17)

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