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Applied Physics Letters

Volumn 62, Issue 26, 1993, Pages 3485-3487

Low temperature Si3N4 direct bonding

(3) Bower, Robert W a Ismail, Mohd S a Roberds, Brian E a

a UNIVERSITY OF CALIFORNIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449005686 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.109002 Document Type: Article

Times cited : (85)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.