Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study

Journal of Applied Physics

Volumn 76, Issue 4, 1994, Pages 2048-2058

  Kortshagen, U ^a   Pukropski, I ^a   Zethoff, M ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449005529     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.357674     Document Type: Article

References (37)